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Semilab USA LLC.

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101 Billerica Ave
Bldg 5, Suite 105
North Billerica, MA 01862
United States of America
Semilab USA LLC.

Semilab Semiconductor Physics Laboratory Co. Ltd.

Semilab is a leading metrology equipment supplier for material and process control in the semiconductor, display, PV and flexible electronic industries.

The company offers advanced electrical and optical based measurement systems, which are predominantly non-contact / non-destructive for both R&D and production monitoring. The technology portfolio includes world leading sensitivity for contamination monitoring; dopant impurity profiling; photoluminescence, spectroscopic ellipsometry (SE), ellipsometric porosimetry and Model Based Infrared Reflectance (MBIR) measurements. Electrical measurement techniques include AFM, non-contact corona-Kelvin based CV / IV measurements, and contact type electrical methods including Fastgate and Hg probing.

Major application areas include silicon wafer quality, diffusion, high K and low K dielectrics, III-V materials, ion implant dose, junction leakage, epitaxial growth, plasma & etch inspection and trench structures. Recent areas of development allowed the combination of several metrology in one platform. For example, our SEIR platforms (SE and MBIR combination) are used for full characterization of highly doped SiGe structures (Thickness, [Ge], dopant concentration). Alternatively, the MBIR system can also be used for trench structures and amorphous carbon applications opening many applications on a unique platform.

Among other metrology combinations, SE and photoluminescence can be used for the characterization of AlGaN structures or SE and non-contact sheet resistance by Eddy current can be applied to TCO applications. All technologies can be offered in fully automated configuration for real-time production control as well as stand-alone / tabletop systems.

Visit our website: www.semilab.hu/
Semilab USA LLC. | 101 Billerica Ave Bldg 5, Suite 105 North Billerica, MA 01862 United States of America | 508x-647x-8400
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