XEI Scientific Inc.
The Fastest Way to Pristine
XEI Scientific, Inc. is the world leader in remote plasma cleaning of hydrocarbon contamination in vacuum chambers. The Evactron® Plasma De-Contaminator™ uses a unique, energy-efficient RF plasma source to generate oxygen radicals plus UV from nitrogen metastables for dual-action removal of adventitious carbon.
Evactron plasma cleaners operate at RP, TMP and UHV levels for in-situ cleaning of EUV and X-ray optics as well as SEM, FIB and TEM samples. The Evactron De-Contaminator can be installed on most vacuum chambers and electron microscopes. Reach base pressure faster, increase daily throughput and obtain better analytical data with Evactron plasma cleaning.